Multi-Channel Data Connectivity

Collects equipment and sensor data across multiple channels and reliably integrates it with higher-level systems such as FDC.

Process Anomaly Detection Solutions

Detects subtle process abnormalities such as wafer wobbling, nozzle teaching errors, and robot arm position deviations.

Semiconductor Domain Expertise

Designs detection architectures tailored to actual process conditions based on a deep understanding of semiconductor equipment structures and FAB environments.

From Data Collection to Insight

Extends collected data into alarms, history tracking, yield analysis, reporting, and AI-based decision support.