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FDC Dashboard Overview
FAULT DETECTION
FDC
(Fault Detection and Classification)
A system that monitors equipment, sensor, and process data in real time to detect and classify abnormal conditions.
FDC CORE FUNCTIONS
From Real-Time Data to Anomaly Detection & Classification
Processes collected equipment, sensor, and process data in real time to deliver actionable insights for field response.
Real-Time Data Acquisition
- Collect equipment, PLC, sensor, metrology, and event/log data
- Build a monitoring environment based on time-series data
Process Monitoring
- Monitor key parameter changes and equipment status in real time
- Visualize trace, trend, and event status
Rule-Based Anomaly Detection
- Detect abnormalities based on thresholds, UCL/LCL, and trend criteria
- Generate alarms and events when abnormalities occur
Fault Classification
- Classify detected abnormal conditions by type
- View and manage them together with alarm history
FDC PROCESS
Key Functions of FDC
1
Real-Time Monitoring
• Real-time trace data acquisition
• Recipe step verification
• Data quality verification
2
Fault Detection
• Rule-based anomaly detection
• Threshold / UCL·LCL monitoring
• Trend / rate-of-change detection
3
Fault Classification
• Classification of anomaly types
• Classification based on management criteria
• Alarm linkage
4
History & Visualization
• Trend Chart
• Dashboard
• Alarm History
• Event History
Reliability
Supports continuous operation through stable data acquisition and processing
Standards-Based Integration
Supports SECS/GEM and a wide range of interfaces
Flexible Configuration
Rule and alarm settings tailored to equipment and process environments
Efficient Operations
Improves on-site response efficiency through real-time monitoring and history visibility
Yield Management System
YIELD MANAGEMENT
YMS
(Yield Management System)
A yield management system designed to manage yield performance and defect data, enabling quality traceability and continuous process improvement.
KEY FUNCTIONS
Key Management Areas of YMS
Streamline everything in one continuous flow—from inspection data to yield, defect analysis, and quality history.
1. Inspection Data Collection
- Collect inspection equipment, measurement results, and defect / bin data
- Link related information such as wafer, lot, and recipe
- Integrate data from multiple sources
2. Yield Status Management
- Monitor yield status by product, lot, and wafer
- Manage results against target yield
- Track yield trends
3. Defect Data Management
- Classify defect types
- Manage defect locations (Wafer Map)
- Analyze defect frequency and patterns
4. Quality History Review
- Review inspection history by wafer / lot
- Link process history with inspection history
- Track quality status and defect history
YMS PROCESS
Key Functions of YMS
1
Data Alignment
• Match reference information across inspection, process, and lot data
• Data validation and consistency management
2
Yield Aggregation
• Calculate yield by product, lot, and wafer
• Yield aggregation and statistical management
3
Defect Classification
• Classify defect, bin, and fail data by type
• Manage defect occurrence location and frequency
4
History Tracking
• Review inspection history by wafer / lot
• Linked review of process history
• Quality data traceability
Yield Visibility
Systematically monitor yield trends by product, lot, and process.
Enhanced Quality Traceability
Strengthen quality history traceability by linking inspection and process histories based on wafer and lot.
Systematic Defect Management
Effectively manage recurring defects based on defect type, location, and frequency data.
Process Improvement Insights
Identify process stages requiring improvement based on yield and defect data, and support process optimization.