TSMS

TSMS is a multi-channel FDC system module that replaces multiple IPCs, enhancing fast data processing speed and improving FAB space efficiency.

SPEC
- Easy channel and sensor expansion
- 0.1 second response time
- Supports Ethernet, RS232C, and RS485
- Prevents data loss during power outages

SSDAM

SSDAM is a vision sensor-specialized module, equipped with a smart vision sensor-integrated wafer wobble detection system, making it suitable for manufacturing processes that are difficult to visually detect.

SPEC
- Real-time OK/NG detection
- AI deep learning image training
- Automatic tool Set-up
- 0.1 second response time

LODAM

LODAM is a ground-integrated controller that functions as a multi-channel integrated control module capable of connection over long distances exceeding 40 meters, providing real-time data analysis results.

SPEC
- Integrated multi-channel control for chambers over 40m distance
- Customizable control tower configurations for various industries
- Supports integration with user-friendly monitoring displays
- Provides analysis results using real-time sensor and equipment data
- Real-time core data integration and monitoring viewer functionality
- Supports sensor setup for additional parameter data collection

ONDAM

ONDAM is a module equipped with on-device technology for predicting semiconductor equipment performance, utilizing AI to forecast the lifespan and performance of equipment components, thereby improving semiconductor yield.

SPEC
- Real-time OK/NG detection
- Utilization of SLM(Small language model)
- Minimization and optimization of observation area
- On-device implementation enabled by the reduction of sensing data volume
- Low power consumption
- Prevention of internal FAB data leakage