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GSF Solution's Anomaly Detection Solution can be extensively applied across key semiconductor processes, including Diffusion, Clean, CMP, Etch, and Photo, and is custom-configured to match the equipment architecture and defect types of each process.
DETECTION
Key Anomaly Detection Items
Various inspection items can be custom-configured based on the structure and anomaly types of processes and equipment.
01
Wafer Wobbling
(Wobbling)
02
Wafer Transfer
Robot Sagging
03
Wafer
Static Electricity
04
Nozzle
Misalignment
05
Nozzle
Suck Back
06
Wafer
Alignment
07
FOUP
Inspection
08
Wafer
Contamination
09
Component Inspection
CCTV-Based Inspection
10
CCTV-Based
Inspection
11
Piping
Flow Rate
EQUIPMENT SOLUTION
Equipment Intelligence & Solutions
Equipment Intelligence
Intelligence domains tailored to equipment conditions and anomaly types
Equipment Refurbishment
Application domains related to equipment refurbishment
Secondary Battery Process Chamber Design
Application domains for secondary battery process chamber design